Includes bibliographical references and author index.
|Statement||Mary Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored ... by SPIE|
|Series||Proceedings of SPIE -- v. 7926, Proceedings of SPIE--the International Society for Optical Engineering -- v. 7926.|
|LC Classifications||TJ1191.5 .M55243236 2011|
|The Physical Object|
|Pagination||1 v. (various pagings) :|
|LC Control Number||2011377975|
Micromachining and Microfabrication Process Technology: October, , Austin, Texas (Proceedings of Spie--The International Society of Optical Engineering, V. ) [Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U. S.), Society of Photo-Optical Instrumentation Engineers, Karen W. Markus] on Author: Karen W. Markus, Semiconductor Equipment. Add tags for "Micromachining and microfabrication process technology XVI: 25 and 27 January , San Francisco, California, United States". Be the first. Similar Items. Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication".In the last two decades microelectromechanical systems (MEMS), microsystems (European usage), micromachines. Volume 2 of Handbook of Microlithography, Micromachining, and Microfabrication V Micromachining and Microfabricatio, P. Rai-Choudhury Volume 2 of Handbook of Microlithography, Micromachining, and Microfabrication, P. Rai-Choudhury, ISBN , IEE materials & devices series Volume 40 of SPIE Press Monograph Series5/5(1).
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a ished with IEE.5/5(1). This handbook contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Eleven chapters cover key aspects of micromachining and microfabrication, including numerous device applications. Micromachining and Microfabrication Process Technology XI Editor(s): Mary-Ann Maher ; Harold D. Stewart ; Jung-Chih Chiao *This item is only available on the SPIE Digital Library. 3 3. Overview of Microfabrication TOC Wafer-level Processes Substrates Wafer Cleaning Oxidation Doping Thin-Film Deposition Wafer Bonding 3. Overview of Microfabrication TOC Pattern Transfer Optical Lithography Design Rules Mask Making Wet Etching Dry-Etching Lift-Off Planarization 3. Overview of Microfabrication TOC.
Micromachining and microfabrication process technology 15 Micromachining and microfabrication process technology fifteen: Responsibility: Mary Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored and published by SPIE. Get this from a library! Micromachining and microfabrication process technology XVIII: 5 and 7 February , San Francisco, California, United States. [Mary Ann Perez-Maher; Paul J Resnick; SPIE (Society); Vuzix Corporation.;] -- Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature. microfabrication are generally much greater than in IC fabrication Bulk Micromachining to Achieve Large Aspect Ratios •Certain etching solutions, such as potassium hydroxide (KOH), have a very low etching rate in the LIGA Process •An important technology of . Micromachining and microfabrication process technology 17 Micromachining and microfabrication process technology seventeen SPIE digital library. Responsibility: Mary Ann Maher, Paul J. Resnick, editors ; sponsored by SPIE ; cosponsored by Dyoptyka (Ireland) [and] VUZIX Corportation (United States).